First Published in EOS/ESD
Technology Oct/Nov 1987
Charge
Versus Voltage Measurements
When to use which
by Peter R. Bossard, Ph.D.
Vice President of R&D, Voyager Technologies, Inc.,
Langehorne, PA
In trying to quantify the effect
of static on semiconductors or electronic devices, the question
often comes up: should I measure the voltage or the charge? For
the most part, although charge is the more basic measure, this
is a matter of convenience, depending on the type of measuring
technique. That it, the technique to use is the one most likely
to be misinterpreted.
ESD problems arise when a net charge
(static) is generated on an object due to the tribolectric effect,
the root cause of all ESD damage. Measuring the net charge on
an object gives a direct indication of the relative merits of
one technique versus another in preventing charge buildup. Therefore,
measuring the triboelectric charge generated on objects is a direct
means of assessing the effectiveness of an ESD control technique
such as a mat or a work-surface.
However, it is not always convenient
to measure charge on people and objects. In these cases, voltage
measurements may be easier to quantify and less subject to error
than charge measurements. Consequently, a voltage measurement
is better for determining the effectiveness of an established
procedure for preventing charge buildup, providing that the relationship
of voltage to charge is kept in mind. Therefore, the choice of
a charge or a voltage measurement depends on the object and the
environments.
For a reliable charge measurement,
the object must be placed in a Faraday cup, where all its electric
field lines are terminated. This technique is useful on small
items such as ICs, wafers, masks and small-to-medium size circuit
boards that can be conveniently placed in a Faraday cup. One of
the nice things about measuring the charge using a Faraday cup
is that it does not matter whether the object in the cup is conductive
or nonconductive-- the net charge is measured in either case.
However, when the object is too large
to fit conveniently in a Faraday cup, the voltage on the object
should be measured. Gross errors can occur if you try to transfer
the charge by conduction from the object to the Faraday cup. To
successfully measure charge by conduction to the cup, the entire
object has to be conductive. The object must be completely isolated
from ground and electric fields. Also, its capacitance must to
be small compared to the capacitance of the Faraday cup.
An example of a tempting but incorrect
procedure for measuring the charge on people in a work environment
is to have a worker touch a Faraday cup, attempting to transfer
his or her charge to the cup. There is often a small and very
weak EMF (less than 1 V) on people and their clothing due to salts
and other ionic elements and compounds. A Faraday cup is a sink
for charge and will attempt to drain down this small EMF. The
net result is that charge can be transferred to the cup, giving
the impression that the object was highly charged when it actually
had very little charge, or that the object was slightly charged
when it actually had a large charge. To avoid these types of problems
when objects cannot be placed in a Faraday cup, measure the voltage
on the object.
Measuring the voltage on an object
that is not a voltage source requires a special type of voltmeter.
Keep in mind that the object has a limited amount of energy at
a given voltage, and care must be taken to ensure the measuring
instrument does not grossly affect the result. The general requirements
are that the voltmeter have a high input impedance (>1011W),
a low input capacitance (< 5 pF), and a wide dynamic
range (> + 10 Kv). Noncontacting and specialty
voltmeters can meet these requirements.
When the proper precautions are taken,
the voltage or charge on an object can be used as data to determine
the effectiveness of ESD procedures. An important point to remember
is that an object's environment, along with its detailed immediate
history (just prior to measurement), can greatly affect the charge
or voltage reading. Therefore, it is necessary to take enough
measurements to get a statistically significant average charge
or voltage. If the average of the charge and voltage (plus four
times the uncertainty) is consistently low (less than the voltage
or charge specification for that environment), then the ESD procedures
in use are effective.